Lateral Photodetectors Made of a Plurality of Selective Growth Region

A photodiode balanced in increased sensitivity and speed. The photodiode includes a semiconductor substrate, an active region formed on the semiconductor substrate, and a comb electrode connected to the active region. The comb electrode includes a plurality of electrode fingers, and each of the electrode fingers includes a transparent electrode contacting the active region, and an opaque electrode formed on the transparent electrode. Here, the width of the opaque electrode is set smaller than the width of the transparent electrode.

Researchers

Wojciech Giziewicz / Yukiya Miyachi / Lionel Kimerling / Jurgen Michel

Departments: Department of Materials Science and Engineering, Materials Research Laboratory
Technology Areas: Electronics & Photonics: Photonics, Semiconductors
Impact Areas: Advanced Materials

  • photodiode
    United States of America | Granted | 7,659,627
  • photodiode
    Japan | Granted | 5,192,272

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