Low Energy, Plasma Free of Nitride Semiconductors and Thin Films
Invention type: Technology
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Case number: #26181J
Researchers
Joseph Casamento
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Debdeep Jena
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Guru Khalsa
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Chandrashekhar Savant
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Zhiren He
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Huili (Grace) Xing
Departments: Department of Materials Science and Engineering
Technology Areas: Chemicals & Materials: Composites / Electronics & Photonics: Semiconductors / Energy & Distribution: Electrochemical Devices
Impact Areas: Advanced Materials
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low energy, plasma free of nitride semiconductors and thin films
United States of America | Pending
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