Devices, Systems, and Methods Including Micro-or Nano-Cantilever Structures
Invention type: Technology
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Case number: #26052J
Researchers
Dirk Englund
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Henry Wen
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Matthew Zimmermann
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Matthew Saha
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Andrew Greenspon
Departments: Dept of Electrical Engineering & Computer Science, Research Laboratory of Electronics
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Electronics & Photonics: Semiconductors
Impact Areas: Advanced Materials
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devices, systems, and methods including micro- or nano-cantilever structures
United States of America | Pending
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