Chip Scale Micro Pump for Achieving High Vacuum
Invention type: Technology
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Case number: #13724
A microvalve device is provided that includes a through via located in an island structure supported on a thermally-insulating membrane supported by a frame. The through via is surrounded by a meltable sealing material. A heater element is positioned on the island structure for sealing the material over the through via by heating the sealing material.
Researchers
Luis Velasquez-Garcia
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Aalap Dighe
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Akintunde Akinwande
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Martin Schmidt
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Carol Livermore-Clifford
Departments: Microsystems Technology Laboratories, Dept of Electrical Engineering & Computer Science
Technology Areas: Chemicals & Materials: Nanotechnology & Nanomaterials / Electronics & Photonics: Semiconductors
Impact Areas: Advanced Materials
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single-use, permanently-sealable microvalve
United States of America | Granted | 9,388,916
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